Impacts of sensor layouts on the performance of a long-stroke nano-positioning stage
Wang, Fu-Cheng, Wang, Kuo-An, Chen, Yi-Yi, Chen, Hsueh-Ju, Yen, Jia-YushVolume:
8
Language:
english
Journal:
Advances in Mechanical Engineering
DOI:
10.1177/1687814016680192
Date:
November, 2016
File:
PDF, 4.11 MB
english, 2016