[AIP BEAMS 2002: 14th International Conference on High-Power Particle Beams - Albuquerque, New Mexico (USA) (23-28 June 2002)] AIP Conference Proceedings - Development of Bipolar Pulse Accelerator for Pulsed Ion Beam Implantation to Semiconductor
Masugata, KatsumiVolume:
650
Year:
2002
DOI:
10.1063/1.1530885
File:
PDF, 1011 KB
2002