Micromechanical microphone using sideband modulation of nonlinear resonators
Boales, Joseph A., Mateen, Farrukh, Mohanty, PritirajVolume:
111
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4996993
Date:
August, 2017
File:
PDF, 763 KB
english, 2017