A Particle-Augmented Mixed Lubrication Modeling Approach to...

A Particle-Augmented Mixed Lubrication Modeling Approach to Predicting Chemical Mechanical Polishing

Terrell, Elon J., Higgs, C. Fred
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Volume:
131
Year:
2009
Language:
english
Journal:
Journal of Tribology
DOI:
10.1115/1.2991173
File:
PDF, 1.29 MB
english, 2009
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