Design and implementation of a custom built variable...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2016 / 05 Vol. 34; Iss. 3

Design and implementation of a custom built variable temperature stage for a secondary ion mass spectrometer

Giordani, Andrew, Tuggle, Jay, Hunter, Jerry L.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
34
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4941785
Date:
May, 2016
File:
PDF, 4.00 MB
english, 2016
Conversion to is in progress
Conversion to is failed