[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10,...

  • Main
  • [ECS 211th ECS Meeting - Chicago,...

[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Extensive Study of the Correlation between Contact Etch Stop Nitride film Properties and Negative Bias Temperature Instabilities Measured in pMOSFETS

Benoit, Daniel, Morin, Pierre, Perrier, Frank, Chaton, Catherine, Charleux, Marion, Regolini, Jorge, Barla, Kathy, Ferreira, Paul
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728807
File:
PDF, 310 KB
english, 2007
Conversion to is in progress
Conversion to is failed