![](/img/cover-not-exists.png)
[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Extensive Study of the Correlation between Contact Etch Stop Nitride film Properties and Negative Bias Temperature Instabilities Measured in pMOSFETS
Benoit, Daniel, Morin, Pierre, Perrier, Frank, Chaton, Catherine, Charleux, Marion, Regolini, Jorge, Barla, Kathy, Ferreira, PaulVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2728807
File:
PDF, 310 KB
english, 2007