Thermally enhanced formation of photon-induced damage on...

Japanese Journal of Applied Physics 2017 / 09 Vol. 56; Iss. 9

Thermally enhanced formation of photon-induced damage on GaN films in Cl 2 plasma

Liu, Zecheng, Asano, Atsuki, Imamura, Masato, Ishikawa, Kenji, Takeda, Keigo, Kondo, Hiroki, Oda, Osamu, Sekine, Makoto, Hori, Masaru
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.096501
Date:
September, 2017
File:
PDF, 1.29 MB
english, 2017
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