Effects of fluorine incorporation on the structural and...

MRS Proceedings 2015 Vol. 1734

Effects of fluorine incorporation on the structural and electrical properties of Diamond-like carbon

Nakanishi, Kento, Otsuka, Jun, Hiratsuka, Masanori, Du, Chen Chung, Shirakura, Akira, Suzuki, Tetsuya
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Volume:
1734
Year:
2015
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/opl.2015.306
File:
PDF, 131.16 MB
english, 2015
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