Fabrication of submicron chalcogenide glass photonic crystal by resist-free nanoimprint lithography
Zeng, Jianghui, Zhang, Qian, Zhang, Peiqing, Tang, Junzhou, Xu, Yinsheng, Chen, Feifei, Shen, Xiang, Dai, ShixunVolume:
123
Language:
english
Journal:
Applied Physics A
DOI:
10.1007/s00339-017-1187-8
Date:
September, 2017
File:
PDF, 1.85 MB
english, 2017