Architecture of source-drain cavity of a p-channel field...

Architecture of source-drain cavity of a p-channel field effect transistor for embedding with epitaxial SiGe for enhanced performance

Parikh, A., Cai, Z.
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Volume:
110
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3638051
Date:
September, 2011
File:
PDF, 539 KB
english, 2011
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