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Ion beam irradiation of nanostructures: sputtering, dopant incorporation, and dynamic annealing
Holland-Moritz, Henry, Johannes, Andreas, Moeller, Wolfhard, Ronning, CarstenLanguage:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/1361-6641/aa88dc
Date:
August, 2017
File:
PDF, 246 KB
english, 2017