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Patterned films by atomic layer deposition using Parafilm as a mask
Zhang, Chao, Kalliomäki, Jesse, Leskelä, Markku, Ritala, MikkoVolume:
36
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5001033
Date:
January, 2018
File:
PDF, 3.66 MB
english, 2018