High Rate Deposition of Mn-Zn Spinel Ferrite Thin Films...

High Rate Deposition of Mn-Zn Spinel Ferrite Thin Films Using Reactive Facing-Target Sputtering.

Kamiki, Taro, Saito, Syunsuke, Hyun, Kong Sok, Nakagawa, Shigeki
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Volume:
50
Year:
2003
Journal:
Journal of the Japan Society of Powder and Powder Metallurgy
DOI:
10.2497/jjspm.50.143
File:
PDF, 2.93 MB
2003
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