Determination of plasma impedance of microwave plasma system by electric field simulation
Shuto, Mitsutoshi, Ohmi, Hiromasa, Kakiuchi, Hiroaki, Yamada, Takahiro, Yasutake, KiyoshiVolume:
122
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4993902
Date:
July, 2017
File:
PDF, 1.94 MB
english, 2017