Geregeltes Reaktivsputtern von Planar- und Rohrkathoden

Vakuum in Forschung und Praxis 2017 / 08 Vol. 29; Iss. 4

Geregeltes Reaktivsputtern von Planar- und Rohrkathoden

Radny, Tobias, Grub, Sebastian, Schäfer, Rolf, Schütte, Thomas
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Volume:
29
Language:
german
Journal:
Vakuum in Forschung und Praxis
DOI:
10.1002/vipr.201700656
Date:
August, 2017
File:
PDF, 405 KB
german, 2017
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