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[ECS 211th ECS Meeting - Chicago, Illinois (May 6-May 10, 2007)] ECS Transactions - Selective Si:C Epitaxy in Recessed Areas and Characterization of the Material Properties
Kim, Yihwan, Ye, Zhiyuan, Lam, Andrew, Zojaji, Ali, Cho, Yonah, Kuppurao, SatheeshVolume:
6
Year:
2007
Language:
english
DOI:
10.1149/1.2727427
File:
PDF, 951 KB
english, 2007