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Improvement of the high- κ /Ge interface thermal stability using an in-situ ozone treatment characterized by conductive atomic force microscopy
Fan, Ji-Bin, Cheng, Xiao-Jiao, Liu, Hong-Xia, Wang, Shu-Long, Duan, LiVolume:
26
Language:
english
Journal:
Chinese Physics B
DOI:
10.1088/1674-1056/26/8/087701
Date:
August, 2017
File:
PDF, 1.20 MB
english, 2017