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A comparative study of copper thin films deposited using magnetron sputtering and supercritical fluid deposition techniques
Giroire, B., Ali Ahmad, M., Aubert, G., Teule-Gay, L., Michau, D., Watkins, J.J., Aymonier, Cyril, Poulon-Quintin, A.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.09.002
Date:
September, 2017
File:
PDF, 809 KB
english, 2017