Electron heating enhancement due to plasma series resonance in a capacitively coupled RF discharge: Electrical modeling and comparison to experimental measurements
Cao, Minglu, Lu, Yijia, Cheng, Jia, Ji, LinhongVolume:
55
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.55.096201
Date:
September, 2016
File:
PDF, 865 KB
english, 2016