Damage-Free Smooth-Sidewall InGaAs Nanopillar Array by...

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ACS Nano 2017 / 09

Damage-Free Smooth-Sidewall InGaAs Nanopillar Array by Metal-Assisted Chemical Etching

Kong, Lingyu, Song, Yi, Kim, Jeong Dong, Yu, Lan, Wasserman, Daniel, Chim, Wai Kin, Chiam, Sing Yang, Li, Xiuling
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Language:
english
Journal:
ACS Nano
DOI:
10.1021/acsnano.7b04752
Date:
September, 2017
File:
PDF, 1.53 MB
english, 2017
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