Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 09 Vol. 35; Iss. 5
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Minimizing open-loop piezoactuator nonlinearity artifacts in atomic force microscope measurements
Yen, Chi-Fu, Sivasankar, SanjeeviVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4994315
Date:
September, 2017
File:
PDF, 1.82 MB
english, 2017