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Single-atom fabrication with electron and ion beams: From surfaces and two-dimensional materials toward three-dimensional atom-by-atom assembly
Kalinin, Sergei V., Pennycook, Stephen J.Volume:
42
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2017.186
Date:
September, 2017
File:
PDF, 1.55 MB
english, 2017