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Atomic hydrogen induced defect kinetics in amorphous silicon
Peeters, Floran J. J., Zheng, Jie, Aarts, Igor M. P., Pipino, Andrew C. R., Kessels, Wilhelmus M. M., van de Sanden, Mauritius C. M.Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4987152
Date:
September, 2017
File:
PDF, 1.98 MB
english, 2017