Compositionally tunable optical properties of hafnium titanium oxide films deposited by atomic layer deposition without intermediate surface hydroxylation
Lebedev, M.S., Kruchinin, V.N., Lebedeva, M.I., Spesivtsev, E.V.Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2017.09.014
Date:
September, 2017
File:
PDF, 1.07 MB
english, 2017