Pull-in study for round gimbaled electrostatic torsion actuators
Xiao, Zhixiong, Peng, Wuyong, Wu, XingTao, Farmer, K RVolume:
12
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/12/2/701
Date:
March, 2002
File:
PDF, 103 KB
english, 2002