Research of mechanical stresses in micromechanical...

Journal of Physics Conference Series 2017 / 07 Vol. 872

Research of mechanical stresses in micromechanical structures based on silicon carbide films produced by magnetron sputtering

Mikhailova, O N, Korlyakov, A V, Lagosh, A V
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Volume:
872
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/872/1/012043
Date:
July, 2017
File:
PDF, 405 KB
english, 2017
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