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Nanoindentation of silicon implanted with hydrogen: effect of implantation dose on silicon’s mechanical properties and nanoindentation-induced phase transformation
Jelenković, Emil V, To, Suet, Goncharova, Lyudmila V, Wong, Sing FaiVolume:
4
Language:
english
Journal:
Materials Research Express
DOI:
10.1088/2053-1591/aa76fe
Date:
July, 2017
File:
PDF, 1.50 MB
english, 2017