In Situ Observation of Metal Properties in a Piezoresistive Pressure Sensor
Sandvand, Asmund, Halvorsen, Einar, Jakobsen, HenrikYear:
2017
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2017.2747090
File:
PDF, 1.77 MB
english, 2017