AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY...

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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2012: Proceedings of the 19th International Conference on Ion Implantation Technology - Valladolid, Spain (25–29 June 2012)] - Radiation protection for high energy implantation of light ions in a production environment

Kroener, Friedrich, Schustereder, Werner, Fuchs, Dieter
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Year:
2012
Language:
english
DOI:
10.1063/1.4766573
File:
PDF, 1.24 MB
english, 2012
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