Effect of incubation time on preparation of continuous and...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2015 / 01 Vol. 33; Iss. 1

Effect of incubation time on preparation of continuous and flat Ru films

Funakubo, Hiroshi, Shiraishi, Takahisa, Oikawa, Takahiro, Hirano, Masaki, Chiba, Hirokazu, Kawano, Kazuhisa
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.4904494
Date:
January, 2015
File:
PDF, 1.72 MB
english, 2015
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