Erratum to: “Influence of external conditions on physical...

Russian Microelectronics 2017 / 7 Vol. 46; Iss. 4

Erratum to: “Influence of external conditions on physical processes and plasma parameters in a model of a high-frequency hybrid plasma system”

Aleksandrov, A. F., Petrov, A. K., Vavilin, K. V., Kral’kina, E. A., Neklyudova, P. A., Nikonov, A. M., Pavlov, V. B., Airapetov, A. A., Odinokov, V. V., Pavlov, G. Ya., Sologub, V. A.
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Volume:
46
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/S1063739717440032
Date:
July, 2017
File:
PDF, 67 KB
english, 2017
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