Investigation of Copper Oxide Ring Formation during Post...

Investigation of Copper Oxide Ring Formation during Post Chemical Mechanical Polishing Cleaning of Cu Interconnect

Kim, Hojoong, Hong, Seokjun, Jin, Yinhua, Lim, Dong Hyun, Kim, Jun-yong, Hwang, Hasub, Kim, Taesung
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Volume:
6
Year:
2017
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.0191708jss
File:
PDF, 720 KB
english, 2017
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