Noble gas ion beams in materials science for future...

Noble gas ion beams in materials science for future applications and devices

Belianinov, Alex, Burch, Matthew J., Kim, Songkil, Tan, Shida, Hlawacek, Gregor, Ovchinnikova, Olga S.
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Volume:
42
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2017.185
Date:
September, 2017
File:
PDF, 1.39 MB
english, 2017
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