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Noble gas ion beams in materials science for future applications and devices
Belianinov, Alex, Burch, Matthew J., Kim, Songkil, Tan, Shida, Hlawacek, Gregor, Ovchinnikova, Olga S.Volume:
42
Language:
english
Journal:
MRS Bulletin
DOI:
10.1557/mrs.2017.185
Date:
September, 2017
File:
PDF, 1.39 MB
english, 2017