Mechanism of charge transport of stress induced leakage current and trap nature in thermal oxide on silicon
Islamov, Damir R, Gritsenko, V A, Perevalov, T V, Orlov, O M, Krasnikov, G YaVolume:
864
Language:
english
Journal:
Journal of Physics: Conference Series
DOI:
10.1088/1742-6596/864/1/012003
Date:
June, 2017
File:
PDF, 492 KB
english, 2017