Thickness modulation effects of Al 2...

Thickness modulation effects of Al 2 O 3 capping layers on device performance for the top-gate thin-film transistors using solution-processed poly(4-vinyl phenol)/Zn-Sn-O gate stacks

Kim, Kyeong-Ah, Bak, Jun-Yong, Yoon, Sung-Min, Kim, Seong Jip, Jeong, Sunho, Choi, Youngmin, Jung, Soon-Won
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Volume:
33
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4916021
Date:
May, 2015
File:
PDF, 1.49 MB
english, 2015
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