Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 07 Vol. 35; Iss. 4
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Electron field emission from SiC nanopillars produced by using nanosphere lithography
Yeşilpınar, Damla, Çelebi, CemVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4989853
Date:
July, 2017
File:
PDF, 1.80 MB
english, 2017