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Plasma–surface interaction at atmospheric pressure: A case study of polystyrene etching and surface modification by Ar/O 2 plasma jet
Luan, Pingshan, Knoll, Andrew J., Bruggeman, Peter J., Oehrlein, Gottlieb S.Volume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.5000691
Date:
September, 2017
File:
PDF, 1.58 MB
english, 2017