[IEEE 2017 IEEE International Interconnect Technology Conference (IITC) - HsinChu, Taiwan (2017.5.16-2017.5.18)] 2017 IEEE International Interconnect Technology Conference (IITC) - Ruthenium interconnects with 58 nm 2 cross-section area using a metal-spacer process
Dutta, Shibesh, Kundu, Shreya, Wen, Lianggong, Jamieson, Geraldine, Croes, Kristof, Gupta, Anshul, Bommels, Jurgen, Wilson, Christopher J., Adelmann, Christoph, Tokei, ZsoltYear:
2017
Language:
english
DOI:
10.1109/iitc-amc.2017.7968937
File:
PDF, 426 KB
english, 2017