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Influence of LaSiO x passivation interlayer on band alignment between PEALD-Al 2 O 3 and 4H-SiC determined by X-ray photoelectron spectroscopy
Wang, Qian, Cheng, Xinhong, Zheng, Li, Shen, Lingyan, Zhang, Dongliang, Gu, Ziyue, Qian, Ru, Cao, Duo, Yu, YuehuiLanguage:
english
Journal:
Applied Surface Science
DOI:
10.1016/j.apsusc.2017.09.099
Date:
September, 2017
File:
PDF, 716 KB
english, 2017