Comparison of a-C:N:H layers grown at the anode and cathode in RF-PACVD processing
Tkacz‐Śmiech, Katarzyna, Dyndał, Katarzyna, Sanetra, Jerzy, Jaglarz, JanuszLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2017.09.025
Date:
September, 2017
File:
PDF, 1.35 MB
english, 2017