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[AIP ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology - IIT 2006 - Marseille (France) (11-16 June 2006)] AIP Conference Proceedings - Optima HD: Single Wafer Mechanical Scan Ion Implanter
Splinter, P., Graf, M., Godfrey, C., Huang, Y., Polner, D., Danis, J., Ota, K.Volume:
866
Year:
2006
Language:
english
DOI:
10.1063/1.2401589
File:
PDF, 685 KB
english, 2006