[AIP ION IMPLANTATION TECHNOLOGY: 17th International Conference on Ion Implantation Technology - Monterey (California) (8–13 June 2008)] AIP Conference Proceedings - Using Ion Implantation to Streamline High Volt Processing in Standard CMOS
Naughton, John J., Towner, Janet M., Seebauer, Edmund G., Felch, Susan B., Jain, Amitabh, Kondratenko, Yevgeniy V.Year:
2008
Language:
english
DOI:
10.1063/1.3033566
File:
PDF, 1.94 MB
english, 2008