Low Hydrogen Silicon Carbon Nitride Cap for High...

ECS Transactions 2017 / 04 Vol. 77; Iss. 5

Low Hydrogen Silicon Carbon Nitride Cap for High Performance Sub-10 nm Cu-Low k Interconnect

Nguyen, Son van, Shobha, Hosadurga k, Haigh, Thomas J, Yao, Yiping, Tai, Leo, Cohen, Stephan A, Shaw, Thomas M, Hu, Chao-kun, Liniger, Eric, Virwani, Kumar, Kellock, Andrew J, Canaperi, Donald F
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Volume:
77
Language:
english
Journal:
ECS Transactions
DOI:
10.1149/07705.0111ecst
Date:
April, 2017
File:
PDF, 488 KB
english, 2017
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