A Comprehensive Big-Data-Based Monitoring System for Yield...

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IEEE Transactions on Semiconductor Manufacturing 2017

A Comprehensive Big-Data-Based Monitoring System for Yield Enhancement in Semiconductor Manufacturing

Nakata, Kouta, Orihara, Ryohei, Mizuoka, Yoshiaki, Takagi, Kentaro
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Year:
2017
Language:
english
Journal:
IEEE Transactions on Semiconductor Manufacturing
DOI:
10.1109/TSM.2017.2753251
File:
PDF, 624 KB
english, 2017
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