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[WORLD SCIENTIFIC The 2015 International Conference on Applied Mechanics, Mechatronics and Intelligent Systems (AMMIS2015) - Nanjing, China (19 – 20 June 2015)] Applied Mechanics, Mechatronics and Intelligent Systems - A Novel Symmetric Test Structure for Residual Stress on MEMS Thin Film
Tu, Chenfeng, Zhou, Zai-fa, Xu, YanboLanguage:
english
DOI:
10.1142/9789814733878_0008
File:
PDF, 327 KB
english