Temperature dependence of the biaxial tensile strain in...

Japanese Journal of Applied Physics 2017 / 06 Vol. 56; Iss. 6S1

Temperature dependence of the biaxial tensile strain in suspended Ge cross-shaped microstructures

Ishida, Satomi, Kako, Satoshi, Oda, Katsuya, Iwamoto, Satoshi, Arakawa, Yasuhiko
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Volume:
56
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.7567/JJAP.56.06GF04
Date:
June, 2017
File:
PDF, 1.04 MB
english, 2017
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