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High carrier activation of Mg ion-implanted GaN by conventional rapid thermal annealing
Niwa, Takaki, Fujii, Takahiro, Oka, TohruVolume:
10
Language:
english
Journal:
Applied Physics Express
DOI:
10.7567/APEX.10.091002
Date:
September, 2017
File:
PDF, 692 KB
english, 2017