Single step sequential polydimethylsiloxane wet etching to...

Journal of Micromechanics and Microengineering 2017 / 11 Vol. 27; Iss. 11

Single step sequential polydimethylsiloxane wet etching to fabricate a microfluidic channel with various cross-sectional geometries

Wang, C-K, Liao, W-H, Wu, H-M, Lo, Y-H, Lin, T-R, Tung, Y-C
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Volume:
27
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/1361-6439/aa874d
Date:
November, 2017
File:
PDF, 2.43 MB
english, 2017
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