Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2017 / 09 Vol. 35; Iss. 5
Effect of composition in Si 1−x Ge x seed layer on the solid phase crystallization of ultrathin amorphous silicon layer
Kim, Youngmo, Baek, Seungbeom, Jang, Yongwoon, Park, Jiwoo, Sohn, HyunchulVolume:
35
Language:
english
Journal:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
DOI:
10.1116/1.4993801
Date:
September, 2017
File:
PDF, 3.26 MB
english, 2017