Accurate Quantification of Si/SiGe Interface Profiles via Atom Probe Tomography
Dyck, Ondrej, Leonard, Donovan N., Edge, Lisa F., Jackson, Clayton A., Pritchett, Emily J., Deelman, Peter W., Poplawsky, Jonathan D.Language:
english
Journal:
Advanced Materials Interfaces
DOI:
10.1002/admi.201700622
Date:
September, 2017
File:
PDF, 3.97 MB
english, 2017